Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Materials
سال: 2020
ISSN: 1996-1944
DOI: 10.3390/ma14010128